{"id":178318,"date":"2026-09-23T08:02:00","date_gmt":"2026-09-23T01:02:00","guid":{"rendered":"https:\/\/phongvu.vn\/cong-nghe\/?p=178318"},"modified":"2026-09-22T23:53:22","modified_gmt":"2026-09-22T16:53:22","slug":"trung-quoc-thu-nghiem-chip-duoi-3nm-bang-duv-va-gaa","status":"publish","type":"post","link":"https:\/\/phongvu.vn\/cong-nghe\/trung-quoc-thu-nghiem-chip-duoi-3nm-bang-duv-va-gaa\/","title":{"rendered":"Trung Qu\u1ed1c th\u1eed nghi\u1ec7m chip d\u01b0\u1edbi 3nm b\u1eb1ng DUV v\u00e0 GAA, kh\u00f4ng c\u1ea7n EUV"},"content":{"rendered":"\n

PV Tech News \u2013 Vi\u1ec7n Vi \u0111i\u1ec7n t\u1eed thu\u1ed9c Vi\u1ec7n H\u00e0n l\u00e2m Khoa h\u1ecdc Trung Qu\u1ed1c (CAS) v\u1eeba ho\u00e0n th\u00e0nh giai \u0111o\u1ea1n t\u00edch h\u1ee3p quy tr\u00ecnh ban \u0111\u1ea7u cho transistor GAA, s\u1ea3n xu\u1ea5t b\u1eb1ng m\u00e1y quang kh\u1eafc DUV thay v\u00ec EUV. \u0110\u00e2y \u0111\u01b0\u1ee3c xem l\u00e0 m\u1ed9t h\u01b0\u1edbng \u0111i kh\u00e1c cho ti\u1ebfn tr\u00ecnh chip d\u01b0\u1edbi 3nm.<\/strong><\/p>\n\n\n\n

T\u1ea1i s\u1ef1 ki\u1ec7n IC WORLD t\u1ed5 ch\u1ee9c \u1edf B\u1eafc Kinh ng\u00e0y 16\/9, \u00f4ng Ye Tianchun, k\u1ef9 s\u01b0 tr\u01b0\u1edfng National Major Special Project 02, c\u00f4ng b\u1ed1 th\u00f4ng tin tr\u00ean. Theo \u00f4ng, nh\u00f3m nghi\u00ean c\u1ee9u t\u1ea1i CAS \u0111\u00e3 ho\u00e0n t\u1ea5t b\u01b0\u1edbc t\u00edch h\u1ee3p quy tr\u00ecnh ban \u0111\u1ea7u cho transistor GAA s\u1eed d\u1ee5ng k\u00eanh nanosheet x\u1ebfp ch\u1ed3ng, ch\u1ebf t\u1ea1o ho\u00e0n to\u00e0n b\u1eb1ng thi\u1ebft b\u1ecb DUV.<\/p>\n\n\n\n

Trong ng\u00e0nh b\u00e1n d\u1eabn, EUV t\u1eeb l\u00e2u gi\u1eef vai tr\u00f2 c\u00f4ng ngh\u1ec7 n\u1ec1n t\u1ea3ng \u0111\u1ec3 t\u1ea1o ra c\u00e1c ti\u1ebfn tr\u00ecnh ng\u00e0y c\u00e0ng nh\u1ecf. Khi kh\u1ea3 n\u0103ng ti\u1ebfp c\u1eadn EUV b\u1ecb h\u1ea1n ch\u1ebf, c\u00e1c nh\u00e0 nghi\u00ean c\u1ee9u Trung Qu\u1ed1c chuy\u1ec3n h\u01b0\u1edbng khai th\u00e1c n\u1ec1n t\u1ea3ng DUV s\u1eb5n c\u00f3, k\u1ebft h\u1ee3p v\u1edbi ki\u1ebfn tr\u00fac transistor GAA (Gate-All-Around) \u0111\u1ec3 b\u00f9 \u0111\u1eafp gi\u1edbi h\u1ea1n v\u1ec1 \u0111\u1ed9 ph\u00e2n gi\u1ea3i quang kh\u1eafc. GAA l\u00e0 ki\u1ebfn tr\u00fac transistor th\u1ebf h\u1ec7 sau FinFET. N\u1ebfu FinFET ch\u1ec9 cho ph\u00e9p c\u1ed5ng \u0111i\u1ec1u khi\u1ec3n bao ph\u1ee7 ba m\u1eb7t c\u1ee7a k\u00eanh d\u1eabn, GAA cho ph\u00e9p c\u1ed5ng bao quanh to\u00e0n b\u1ed9 k\u00eanh. C\u1ea5u tr\u00fac n\u00e0y c\u1ea3i thi\u1ec7n kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t d\u00f2ng \u0111i\u1ec7n, gi\u1ea3m d\u00f2ng r\u00f2 khi transistor thu nh\u1ecf xu\u1ed1ng c\u00e1c node d\u01b0\u1edbi 3nm.<\/p>\n\n\n\n

\"Trung
Trung Qu\u1ed1c th\u1eed nghi\u1ec7m chip d\u01b0\u1edbi 3nm b\u1eb1ng DUV v\u00e0 GAA (Ngu\u1ed3n: Internet)<\/figcaption><\/figure>\n\n\n\n

V\u1ec1 m\u1eb7t s\u1ed1 li\u1ec7u, c\u00e1c transistor th\u1eed nghi\u1ec7m \u0111\u1ea1t t\u1ef7 l\u1ec7 d\u00f2ng b\u1eadt\/t\u1eaft (Ion\/Ioff) l\u1ea7n l\u01b0\u1ee3t kho\u1ea3ng 9,7\u00d710\u2075 v\u00e0 7,6\u00d710\u2075, v\u01b0\u1ee3t ng\u01b0\u1ee1ng m\u1ee5c ti\u00eau 5\u00d710\u2075 m\u00e0 nh\u00f3m nghi\u00ean c\u1ee9u \u0111\u1eb7t ra ban \u0111\u1ea7u. Ch\u1ec9 s\u1ed1 n\u00e0y ph\u1ea3n \u00e1nh kh\u1ea3 n\u0103ng chuy\u1ec3n m\u1ea1ch hi\u1ec7u qu\u1ea3 c\u1ee7a transistor, v\u01b0\u1ee3t ng\u01b0\u1ee1ng c\u00e0ng cao \u0111\u1ed3ng ngh\u0129a hi\u1ec7u n\u0103ng chuy\u1ec3n \u0111\u1ed5i c\u00e0ng \u1ed5n \u0111\u1ecbnh. CAS m\u00f4 t\u1ea3 k\u1ebft qu\u1ea3 n\u00e0y l\u00e0 m\u1ed9t h\u01b0\u1edbng ph\u00e1t tri\u1ec3n transistor MOS m\u1edbi, ph\u1ee5c v\u1ee5 m\u1ee5c ti\u00eau s\u1ea3n xu\u1ea5t ti\u1ebfn tr\u00ecnh d\u01b0\u1edbi 3nm t\u1ea1i Trung Qu\u1ed1c.<\/p>\n\n\n\n

\u00d4ng Ye Tianchun g\u1ecdi b\u01b0\u1edbc ti\u1ebfp theo l\u00e0 “ph\u00e1 v\u1ee1 s\u1ef1 ph\u1ee5 thu\u1ed9c v\u00e0o l\u1ed9 tr\u00ecnh”, t\u1ee9c kh\u00f4ng \u0111i theo ho\u00e0n to\u00e0n con \u0111\u01b0\u1eddng c\u00f4ng ngh\u1ec7 chip ti\u00ean ti\u1ebfn m\u00e0 th\u1ebf gi\u1edbi \u0111ang s\u1eed d\u1ee5ng, m\u00e0 x\u00e2y d\u1ef1ng l\u1ed9 tr\u00ecnh ri\u00eang ph\u00f9 h\u1ee3p v\u1edbi \u0111i\u1ec1u ki\u1ec7n c\u00f4ng nghi\u1ec7p trong n\u01b0\u1edbc.<\/p>\n\n\n\n

D\u00f9 v\u1eady, \u0111\u00e2y ch\u01b0a ph\u1ea3i m\u1ed9t quy tr\u00ecnh s\u1ea3n xu\u1ea5t chip 3nm ho\u00e0n ch\u1ec9nh. Th\u00e0nh t\u1ef1u c\u00f4ng b\u1ed1 m\u1edbi d\u1eebng \u1edf giai \u0111o\u1ea1n ph\u00e1t tri\u1ec3n thi\u1ebft b\u1ecb v\u00e0 t\u00edch h\u1ee3p quy tr\u00ecnh ban \u0111\u1ea7u. \u0110\u1ec3 \u0111\u01b0a v\u00e0o s\u1ea3n xu\u1ea5t th\u1ef1c t\u1ebf, nh\u00f3m nghi\u00ean c\u1ee9u c\u00f2n ph\u1ea3i gi\u1ea3i quy\u1ebft \u0111\u1ed3ng th\u1eddi nhi\u1ec1u c\u00f4ng \u0111o\u1ea1n kh\u00e1c: l\u1eafng \u0111\u1ecdng v\u1eadt li\u1ec7u, kh\u1eafc, l\u00e0m s\u1ea1ch, \u0111o ki\u1ec3m, t\u00edch h\u1ee3p quy tr\u00ecnh v\u00e0 ki\u1ec3m so\u00e1t t\u1ef7 l\u1ec7 th\u00e0nh ph\u1ea9m. Kho\u1ea3ng c\u00e1ch t\u1eeb m\u1ed9t transistor th\u1eed nghi\u1ec7m \u0111\u1ebfn d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t v\u1eabn c\u00f2n r\u1ea5t l\u1edbn.<\/p>\n\n\n\n

H\u01b0\u1edbng nghi\u00ean c\u1ee9u n\u00e0y kh\u00f4ng ph\u1ea3i xu\u1ea5t ph\u00e1t \u0111i\u1ec3m m\u1edbi. CAS cho bi\u1ebft ng\u00e0nh c\u00f4ng nghi\u1ec7p m\u1ea1ch t\u00edch h\u1ee3p Trung Qu\u1ed1c \u0111\u00e3 tr\u1ea3i qua b\u1ed1n th\u1eadp k\u1ef7 ph\u00e1t tri\u1ec3n, t\u1eeb ti\u1ebfn tr\u00ecnh 3 micron xu\u1ed1ng 7nm r\u1ed3i 5nm. Vi\u1ec7n Vi \u0111i\u1ec7n t\u1eed \u0111\u00e3 nghi\u00ean c\u1ee9u 10 th\u1ebf h\u1ec7 c\u00f4ng ngh\u1ec7, tr\u1ef1c ti\u1ebfp tham gia ph\u00e1t tri\u1ec3n 7 th\u1ebf h\u1ec7 trong s\u1ed1 \u0111\u00f3. N\u0103m 2008, vi\u1ec7n ho\u00e0n th\u00e0nh t\u00edch h\u1ee3p CMOS 22nm. Giai \u0111o\u1ea1n 2012\u20132015 t\u1eadp trung c\u1ea3i thi\u1ec7n FinFET t\u1eeb 14nm xu\u1ed1ng 3nm, tr\u01b0\u1edbc khi chuy\u1ec3n sang nghi\u00ean c\u1ee9u GAA d\u01b0\u1edbi 3nm t\u1eeb n\u0103m 2020.<\/p>\n\n\n\n

\"Trung
Trung Qu\u1ed1c \u0111ang m\u1edf con \u0111\u01b0\u1eddng ti\u1ebfp c\u1eadn c\u00f4ng ngh\u1ec7 d\u01b0\u1edbi 3nm cho ng\u00e0nh b\u00e1n d\u1eabn (Ngu\u1ed3n: Internet)<\/figcaption><\/figure>\n\n\n\n

Vi\u1ec7c thu nh\u1ecf ti\u1ebfn tr\u00ecnh xu\u1ed1ng d\u01b0\u1edbi 3nm ng\u00e0y c\u00e0ng kh\u00f3 kh\u0103n v\u1ec1 m\u1eb7t v\u1eadt l\u00fd. Khi k\u00edch th\u01b0\u1edbc c\u1ed5ng gi\u1ea3m, \u0111i\u1ec7n tr\u01b0\u1eddng t\u0103ng v\u00e0 kh\u1ea3 n\u0103ng v\u1eadn chuy\u1ec3n h\u1ea1t t\u1ea3i c\u00f3 th\u1ec3 suy gi\u1ea3m, k\u00eanh d\u1eabn ng\u1eafn h\u01a1n khi\u1ebfn hi\u1ec7u \u1ee9ng k\u00eanh ng\u1eafn v\u00e0 d\u00f2ng r\u00f2 kh\u00f3 ki\u1ec3m so\u00e1t h\u01a1n. C\u1ea5u tr\u00fac ba chi\u1ec1u thu nh\u1ecf c\u0169ng \u0111\u00f2i h\u1ecfi ti\u00eau chu\u1ea9n cao h\u01a1n v\u1ec1 c\u00e1ch ly v\u00e0 c\u00f4ng ngh\u1ec7 quang kh\u1eafc. V\u00ec v\u1eady, cu\u1ed9c \u0111ua chip d\u01b0\u1edbi 3nm kh\u00f4ng ch\u1ec9 xoay quanh m\u1ed9t chi\u1ebfc m\u00e1y quang kh\u1eafc, m\u00e0 \u0111\u00f2i h\u1ecfi s\u1ef1 ph\u1ed1i h\u1ee3p c\u1ee7a to\u00e0n b\u1ed9 h\u1ec7 th\u1ed1ng c\u00f4ng ngh\u1ec7 s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n

K\u1ebft qu\u1ea3 t\u1eeb CAS ch\u01b0a ch\u1ee9ng minh EUV s\u1ebd kh\u00f4ng c\u1ea7n thi\u1ebft. \u0110i\u1ec1u h\u01b0\u1edbng nghi\u00ean c\u1ee9u n\u00e0y th\u1ec3 hi\u1ec7n l\u00e0 Trung Qu\u1ed1c \u0111ang th\u1eed m\u1edf th\u00eam m\u1ed9t con \u0111\u01b0\u1eddng ti\u1ebfp c\u1eadn c\u00f4ng ngh\u1ec7 d\u01b0\u1edbi 3nm, trong b\u1ed1i c\u1ea3nh kh\u1ea3 n\u0103ng ti\u1ebfp c\u1eadn EUV b\u1ecb gi\u1edbi h\u1ea1n. N\u1ebfu ti\u1ebfp t\u1ee5c \u0111\u01b0\u1ee3c ho\u00e0n thi\u1ec7n, h\u01b0\u1edbng DUV k\u1ebft h\u1ee3p GAA c\u00f3 th\u1ec3 tr\u1edf th\u00e0nh m\u1ed9t ph\u1ea7n trong n\u1ed7 l\u1ef1c x\u00e2y d\u1ef1ng l\u1ed9 tr\u00ecnh chip ti\u00ean ti\u1ebfn mang t\u00ednh \u0111\u1ed9c l\u1eadp h\u01a1n c\u1ee7a n\u01b0\u1edbc n\u00e0y. \u0110\u1eebng qu\u00ean theo d\u00f5i Phong V\u0169 Tech News<\/a> \u0111\u1ec3 c\u1eadp nh\u1eadt nh\u1eefng tin t\u1ee9c c\u00f4ng ngh\u1ec7 m\u1edbi nh\u1ea5t!<\/p>\n\n\n\n

Ngu\u1ed3n: \u0110\u1eddi s\u1ed1ng Ph\u00e1p lu\u1eadt<\/em><\/p>\n\n\n\n

B\u00e0i vi\u1ebft li\u00ean quan:<\/strong><\/p>\n\n\n\n